Apparently the Vacuum pumps can be responsible for a lot of noise when on their way out on these engines. I doubt you did something wrong. I did read somewhere if you take the diaphragm out and flip it round it can work to stop noise. But if it needs replacing make sure it's an original Pierburg branded one as the aftermarket ones can leak oil. If it happens again try the old solid bar or screwdriver test to narrow down where the noise is coming from.
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